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光学薄膜测厚仪ST80009(大型)

产品名称:光学薄膜测厚仪ST80009(大型)

产品型号:
ST8000-MAP
 The Smallest Spot Size to Measure
Submicron Pattern
 Simultaneous Multi-spot Measurement
 Half-tone Measurement for 4-Mask Process
   
Feature
Stage Size370mm x 470 mm~
Measurement Range1000Å~ 2.5㎛ at Sub-micron size
Spot size~ 0.2㎛ x 0.2㎛
Measurement Speed14sec./Area
Application AreasHalf-tone Measurement 
All Capability of ST6000/7000
FunctionAll Capabilities of ST6000
Fine Pattern Measurement 
Auto Focusing
CCD Camera
Pattern Recognition
CIM Communication